What is a Spin Rinse Dryer?Semiconductor wafers are fabricated in a clean environment. As electronic deviced and chips get smaller and smaller particles become critical to ensure wafers yield good working chips. The semiconductor processing is a sequence of steps when chemicals are used either to add layers or remove layers, either fully or partialy, and particles can be generated in these processes as well as from the external environment.
Before a semiconductor wafer starts the next processing step, it is essential that the wafers are as clean as possible and are perfectly dry before progressing through the line: - this is the job odf the spin rinse dryer.
Cleanliness is EssentialEvery part of the spin rinse dryer is designed to clean and keep wafers clean - washing away any loosley adhered particles. Some design criteria:
- Contactless Nitrogen Seal
- Rinse to resistivity option
- AntiStatic Options
- Mirror polished Stainless Steel
- Multi Step processing
- Anti Vibration Balancing
- Cutomised rotors and holders
Spin Rinse Dryers - Vapor Drying
There are several ways to clean and dry wafers. We provide both Spin Rinse Drying or Vapor drying
Used wet benchesDependent on your chemistry or need, a used wet bench may be an option. We can help locate used tools and modify these or upgrade to your exact specification.
Related Products and ServicesWhite Knight Pumps:
We are local agents for the world leader in high temperature chemical pumping. With a range across the board for corrosive or elevated temperatures the White Knight products are renowned for quality, reliability and increased uptime.
Upgrades and Repair: From newly designed and built systems to upgrading tools either in the field or back at the factory we can provide a cost effective solution