Tracks Coaters Spinners & Developers
Photolithography Solutions
Tool selection for material dispense and removal criteria is usually based on:
Process
- Vapour Prime
- Coater Station
- Positive Resist
- Negative Resist
- Developer Station
- Hot Plate
- Chill Plate
- Other
Throughput
- Automatic Handling
- Belt Driven
- Robotic Arms
- Manual Loading
- Simultaneous or single processing
Flexibility
- Number of Pumps
- Dispense Quantities
- Dynamic / Moving dispense
- Static dispense
- Syringe Options
- Ultrasonic Dispense
- Other
Configured to your needs.... Multi-process, stacked hotplates etc..
Multi Cluster Tools
Manual & Semi Auto options
Scrubbers and Cleaning
Tracks are often used for automatically cleaning wafers after other processes. Placing a full cassette of wafers on one end and running them through a cleaning process gives a simple and effective solution in the production environment to remove any debris from previous process steps.
Whatever your need we can provide you a system to suit. Just about every system is customised to your needs. From spinners and hotplates that fit into a wet bench to fully robotic track systems running multiple processes, we can help.
Manual Spinners & Hotplates
Ideal for laboratory use or for putting into wet benches
Support your old SVG!
Extend the lifetime of your legacy SVG equipment - arrange an audit visit...
In addition to being able to supply you totally remanufactured warranted systems, configured to your needs, we can provide service and support on your installed base - often at a fraction of the cost of other companies.
Service Support available
Extend the lifetime of your older tools by having an audit and regular service visit.
Wafertec Resist Pump Repair & Refurbishment
Many older tools utilise Wafertec, Cybor or Millipore resist pumps - extend their lifetime by getting them serviced, repaired or refurbished.
Automatic as you need.... With remote chemical and resist dispense.
Chemical Dispense Cabinets
Making installation easy.